Optical emission spectroscopy of oxygen microwave plasma for oxide thin film growth application - by Diala Ali Haidar Ahmad
Abstract
The aim of this thesis was to characterize the oxygen plasma generated by a 2.45 GHz microwave source that is being used for oxide thin film growth. The analysi s was conducted by optical emission spectroscopy in order to measure the product ion of dissoc
Description
Thesis (M.S.)--American University of Beirut, Dept. of Physics, 2008.;"Advisor : Dr. Malek Tabbal, Professor , Physics--Member of Committee : Dr. Mazen Al-Ghoul, Associate Professor ,Chemistry--Member of Committee : Prof.. Mounib El Eid, Professor, Physic
Bibliography : leaves 68-70.
Bibliography : leaves 68-70.