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Development and characterization of a low-pressure plasma system for surface modification of materials - by Georges Michel Al Makdessi

Development and characterization of a low-pressure plasma system for surface modification of materials - by Georges Michel Al Makdessi

Al Makdessi, Georges Michel
URI: http://hdl.handle.net/10938/8427
Date: 2010

Abstract:

The aim of this work is to investigate the expansion of reactive species in oxygen low-pressure microwave plasma, using Langmuir probe measuring electron density, electron temperature and EEDF, and actinometry technique to monitor the atomic oxygen densit

Description:

 
Thesis (M.S.)--American University of Beirut, Dept. of Physics, 2010.;"Advisor : Dr. Malek Tabbal, Professor, Department of Physics--Member of Committee : Dr. Samih Isber, Professor, Department of Physics--Member of Committee : Dr. Ghassan Antar, Assistan
 
Bibliography : leaves 86-92.
 

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