dc.contributor.author |
Al Makdessi, Georges Michel |
dc.date.accessioned |
2012-06-13T07:31:58Z |
dc.date.available |
2012-06-13T07:31:58Z |
dc.date.issued |
2010 |
dc.identifier.uri |
http://hdl.handle.net/10938/8427 |
dc.description |
Thesis (M.S.)--American University of Beirut, Dept. of Physics, 2010.;"Advisor : Dr. Malek Tabbal, Professor, Department of Physics--Member of Committee : Dr. Samih Isber, Professor, Department of Physics--Member of Committee : Dr. Ghassan Antar, Assistan |
dc.description |
Bibliography : leaves 86-92. |
dc.description.abstract |
The aim of this work is to investigate the expansion of reactive species in oxygen low-pressure microwave plasma, using Langmuir probe measuring electron density, electron temperature and EEDF, and actinometry technique to monitor the atomic oxygen densit |
dc.format.extent |
xiii, 92 leaves : col. ill. 30 cm. |
dc.language.iso |
eng |
dc.relation.ispartof |
Theses, Dissertations, and Projects |
dc.subject.classification |
T:005365 AUBNO |
dc.subject.lcsh |
Oxidation |
dc.subject.lcsh |
Plasma density |
dc.subject.lcsh |
Plasma diagnostics |
dc.subject.lcsh |
Thin films -- Surfaces |
dc.title |
Development and characterization of a low-pressure plasma system for surface modification of materials - by Georges Michel Al Makdessi |
dc.type |
Thesis |
dc.contributor.department |
American University of Beirut. Faculty of Arts and Sciences. Department of Physics |